E22 after Seagate Barracude-All-GRCC4H on LS-WVL

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I flash my two Seagate
Device Model:     ST3000DM001-9YN166
Firmware Version: CC4B
to

Firmware Version: CC4H

now on reboot my LS-WVL shows E22

 

i flash the  Linkstation firmware 1.54 again. No luck.

 

I do not use Raid.

With SSH i can mount /dev/md21 /mnt/disk2 an all looks fine.

/dev/md22 will mount on /mnt/disk1 automatically

 

After Reboot i get E22 again.

 

Seagate writes the MBR while flashing the Firmware.

With Data on it i can not use rebuild partition table to write a new MBR.

 

No Luck with

dd if=/dev/sda of=/dev/sdb bs=512 count=1

 

No Luck with Check Disk from Webif